百兰朵
Bilateral Electronics · Est. 2009
00序 PROLOGUE
SHANGHAI BILATERAL ELECTRONICSEST. 2009
百兰朵
Precision Ceramic Components
for Semiconductor Manufacturing

Micron precision, born of ceramics.

Backed by the Shanghai Institute of Ceramics and Ningbo Institute of Materials, Chinese Academy of Sciences, we engineer precision parts in alumina, silicon carbide and aluminum nitride for the global semiconductor equipment industry.

31.05°N  121.18°E
SHANGHAI · NINGBO · PINGXIANG
ISO 9001 CERTIFIED
01Company公司

Since 2009, we have devoted ourselves to one craft —
turning advanced ceramic science into parts that serve,
micron by micron, inside the plasma chamber.

0YRS
Industry Focus
of dedication
0
Production Area
across 3 sites
0+
Machines
machining & metrology
0OEM
Tool Platforms
brands served
宁波生产基地
Ningbo Qianwan FacilityFIG. 01

Our R&D team — 3 PhDs, 5 masters and 15 senior engineers — delivers custom precision machining, thermal spray and CVD coating to customer drawings.

From formulation to final metrology, every part closes its loop inside one quality system — the root of our delivery consistency.

ISO 9001 Quality ManagementCertified
Granted Utility PatentsMultiple
China IC Components Innovation AllianceMember
ISO9001 专利证书 专利证书
02Materials Index材料

Nine ultra-hard ceramics,
controlled from powder to part

Covering the principal ceramic systems of semiconductor manufacturing — formulation, sintering and finishing all under one roof.

M-01Al₂O₃AluminaPlasma-etch & heat resistant — the chamber-part standard
M-02SiCSilicon CarbideHigh conductivity & stiffness — carriers and rings
M-03AlNAluminum NitrideConductive yet insulating — heaters and ESC cores
M-04Si₃N₄Silicon NitrideTough, thermal-shock proof — the structural choice
M-05B₄CBoron CarbideUltra-hard — wear parts and ion implantation
M-06BNBoron NitrideMachinable, refractory — release & insulation
M-07SiO₂Fused SilicaLow expansion, transparent — optics & diffusion
M-08Mg₂Al₄Si₅O₁₈CordieriteNear-zero expansion — for precision optical fixtures
M-09ZrO₂ZirconiaHigh toughness & strength, thermal-shock resistant — structural and wear parts
03Manufacturing制造

Three sites,
one system

From forming and sintering in Pingxiang, to cleanroom finishing in Ningbo, to metrology across the line — a complete manufacturing chain for semiconductor parts.

Pingxiang · Forming & Sintering

4,500

Over ten production units — sintering furnaces, degassing machines — for formulation, forming and high-temperature sintering.

Ningbo · Cleanroom Finishing

6,000

Including a 4,000 ㎡ cleanroom and an 80 ㎡ Class-100 area, meeting semiconductor-grade cleanliness.

Machining & Metrology

50+ UNITS

Machining centers, ID/OD and surface grinders, CMMs, surface roughness testers — over fifty precision units.

Compatible with 24 Major Tool Platforms

OEM Index
04Precision精度

Precision is our mother tongue

<0.5μm FLATNESS

Ultra Flatness

Under 0.5 μm across a Φ590 mm workpiece — qualified for DMP and CMP processes.

<0.1μm PV OPTICAL

Optical-grade Polishing

Ion-beam figuring achieves PV below 0.1 μm over a Φ600 mm aperture.

0.1mm MICRO-HOLE

Ceramic Micro-drilling

Micro-holes down to 0.1 mm × 1.2 mm — for the dense hole arrays of shower heads.

平面度检测报告
KURODA flatness reportFIG. 02
光学面形检测
Optical interferometryFIG. 03
三坐标测量
CMM inspectionFIG. 04
05Selected Parts产品

Parts that serve
inside the chamber

Serving 8 core processes Deposition/Etch/RTP/Track/Implant/Diffusion/CMP/Dicing
氧化铝陶瓷制品

Alumina Ceramics

P-01 / Al₂O₃

Ceramic dome · cover ring · chamber insulators

碳化硅陶瓷制品

SiC Ceramics

P-02 / SiC

SiC ring · SiC cover · high-temp carriers

氮化铝陶瓷制品

AlN Ceramics

P-03 / AlN

Cover plate · heater · ESC components

加热器载盘

Heaters & Susceptors

P-04 / HEATER

Cover plate heater · deposition ring

精密加工件

Precision Machined

P-05 / MACHINED

Shower head · nozzle · lift pin · robot blade

晶圆载具

Wafer Carriers & Fixtures

P-06 / CARRIER

RTA graphite susceptor · photomask & custom fixtures

06Cross-Reference件号

Find us by part number

Type an OEM part number or part name to find its equivalent replacement. We supply OEM-equivalent ceramic components in alumina, AlN, SiC and quartz for major semiconductor platforms — AMAT, NAURA, LAM and SPTS.

39 cross-referenced part numbers
AMAT0200-01009Nozzle, 4-Hole 60° Baffle, UltimaHDP-CVDInquire ↗
AMAT0200-18081Chamber Cover, CeramicCVDInquire ↗
AMAT0200-18109Chamber CollarCVDInquire ↗
AMAT0200-18093HDP Side NozzleHDP-CVDInquire ↗
AMAT0200-36630Cover Plate Heater, DXZCVDInquire ↗
AMAT0200-40126Thin Blade, RobotTransfer / RobotInquire ↗
AMAT0010-24500Titan Profiler, Mirra CMP, 200mmCMPInquire ↗
AMAT0200-02398Lift Pin, HeaterHeater / CVDInquire ↗
AMAT0200-35081Preheat Ring, BETPVD (Endura)Inquire ↗
AMAT0200-06870Deposition Ring, CleanCoat, 300mmPVDInquire ↗
AMAT0200-01006Ceramic Dome, StandardHDP-CVD / EtchInquire ↗
AMAT0021-95245Cover RingPVDInquire ↗
AMAT0020-45231Shutter Disc, EncorePVD (Encore)Inquire ↗
AMAT0021-64644Shield, 1-Piece CleanCoat, 300mmPVDInquire ↗
AMAT0200-36631Dimpled Cover PlateCVDInquire ↗
AMAT0200-20217Coil Feedthru, Fixed (PIMP)PVD / IMPInquire ↗
AMAT0200-00299Insulator, Coil Support, Rigid, VectraIon ImplantInquire ↗
AMAT0200-20175Labyrinth, Rigid Coil Support, VectorIon ImplantInquire ↗
AMAT0021-32043Seal, Tray, DSSInquire ↗
NAURA 北方华创10140-000409ECover RingEtch / CVDInquire ↗
NAURA 北方华创10140-000293ARobot Arm PadTransferInquire ↗
NAURA 北方华创10140-000960BQ-AL-TEInquire ↗
NAURA 北方华创10140-000260DInsulation Ring (AlN PM)Inquire ↗
NAURA 北方华创10140-000608ACover RingInquire ↗
NAURA 北方华创10150-002788CRobot Finger, PEAPTransferInquire ↗
NAURA 北方华创10150-001426AIsolation Part, SH-PEAInquire ↗
NAURA 北方华创10150-001401AFork-Plate ConnectorTransferInquire ↗
NAURA 北方华创10150-001020AClamp Ring, 20TInquire ↗
NAURA 北方华创10150-001710AFocus Ring, PECVD550PECVDInquire ↗
NAURA 北方华创10150-001104ACounterweight Guard Ring, 370G+Inquire ↗
NAURA 北方华创10150-001105CClamp RingInquire ↗
NAURA 北方华创10150-001101Insulation RingInquire ↗
NAURA 北方华创10150-001102AFocus RingEtchInquire ↗
NAURA 北方华创10130-003580ACounterweight Isolation PlateInquire ↗
LAM15-282056-00Showerhead RF IsolatorEtch / CVDInquire ↗
LAM716-162898-005Inner Electrode, 300mmEtchInquire ↗
LAM713-027299-002SpacerInquire ↗
LAM713-173271-001NC Chuck PinESC / ChuckInquire ↗
SPTS707095DSI-V Endpoint ChamberEtch (SPTS)Inquire ↗
07Clients客户

Proven on production lines
around the world

Oxford Instruments

High-purity alumina & AlN parts for MOCVD and plasma-etch systems

Equipment

BYD Semiconductor

Custom SiC & alumina parts for SiC power-device lines

Power

EpiStar 晶元光电

Long-term supplier of MOCVD susceptors and shower heads

LED

San'an IC

Ceramic rings and discs for wafer-fab equipment

LED / IC

Silan Micro

High-precision alumina structural parts for power-device lines

Power

AMTC

Precision ceramic parts for photomask equipment

Photomask

MGM Technology

Custom ceramic parts for packaging and test equipment

Packaging

Saphilux

Refractory ceramic parts for sapphire growth furnaces

Sapphire

Changelight

Key ceramic parts for LED epitaxy and chip-fab tools

LED
08FAQ常见问题

Frequently asked questions

Are you the OEM? What is your relationship to AMAT / NAURA / LAM / SPTS?

Shanghai Bilateral Electronics is an independent manufacturer of semiconductor ceramic components, producing OEM-equivalent replacement parts built to the same material and grade. All brand names and part numbers are trademarks of their respective owners, used for identification only; we are not affiliated with, authorized by, or endorsed by the original equipment manufacturers.

Do you provide a Certificate of Conformance (COC)?

Yes. Every lot ships with a Certificate of Conformance (COC) verifying that material and grade meet specification.

Can you make parts to an OEM part number or to my drawing?

Yes. Provide an OEM part number for a cross-referenced equivalent, or we custom-develop from your drawing or sample, with precision machining to ±0.01 mm.

What materials do you work with?

Alumina (Al₂O₃), silicon carbide (SiC), aluminum nitride (AlN), silicon nitride (Si₃N₄), quartz and other ultra-hard ceramics — formulation, sintering and finishing all in-house.

Which equipment platforms do you support?

AMAT, NAURA, LAM, SPTS and more — compatible with 24 major semiconductor tool platforms, serving deposition, etch, ion-implant and other core processes.

How do I get a quote? What about lead time and MOQ?

Send a part number or drawing to sales@bilateral.top or use the inquiry form; our engineers respond within 24 hours. Prototyping and volume are both supported; lead time and MOQ depend on the specific part and quantity.

09Contact联系

Start a
conversation

From standard-part quotations to fully custom development from your drawings — tell us the material, dimensions and tolerances, and our engineers will take it from there.

Phone / WeChat+86 153 1655 5536
AddressBldg 20, No.136 Yuhai East Rd, Qianwan, Ningbo, China
Engineers online — reply within 24h

Delivered to both sales & management · strictly confidential

Received

Our engineering team will contact you within 24 hours. For urgent matters, call +86 153 1655 5536.

INQUIRY LOGGED — REPLY WITHIN 24H